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A (not so) short introduction to MEMS [electronic resource] /

by Chollet, Franck; Liu, Haobing.
Publisher: [Sl : memscylopedia.org, 2012Description: 208p. : ill.ISBN: 9782954201504.Other title: Introduction to MEMS.Subject(s): Microelectromechanical systemsOnline resources: Available online
List(s) this item appears in: DEP
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Holdings: Book

Mode of access: Internet

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