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_aTK7871.85 _bC25 1996 |
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| 100 | 1 | _aCampbell, Stephen A. | |
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cAtephen A. Campbell |
| 260 |
_aNew York : _bOxford University Press, _cc1996 |
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| 300 |
_axv, 536 p. : _bill.; _c25 cm. |
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| 490 | 0 | _aThe Oxford series in electrical engineering | |
| 504 | _aIncludes index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
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