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Chollet, Franck
A (not so) short introduction to MEMS [electronic resource] / Tranck Chollet, Hoabing Liu Introduction to MEMS - [Sl : memscylopedia.org, 2012 - 208p. : ill.
Mode of access: Internet
ISBN:
9782954201504
Subjects--Topical Terms:
Microelectromechanical systems
LC Class. No.:
TK7875
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