000 -LEADER |
fixed length control field |
00963nam a2200253 4500 |
001 - CONTROL NUMBER |
control field |
0000010152 |
003 - CONTROL NUMBER IDENTIFIER |
control field |
0 |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20100203120122.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
100521s2006####nyu###########001#0#eng## |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0471784060 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
PSP |
Transcribing agency |
PSP |
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC) |
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 M379 2006 |
100 1# - MAIN ENTRY--PERSONAL NAME |
Personal name |
May, Gary S. |
245 10 - TITLE STATEMENT |
Title |
Fundamentals of semiconductor manufacturing and process control / |
Statement of responsibility, etc |
Gary S. May [and] Costas J. Spanos |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
New Jersey : |
Name of publisher, distributor, etc |
John Wiley & Sons, |
Date of publication, distribution, etc |
2006. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xix; 463p. : |
Other physical details |
ill.; |
Dimensions |
24cm. |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc |
Includes bibliographical references and index |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Integrated circuits |
General subdivision |
Design and construction |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Process control |
General subdivision |
Statistical methods |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductors |
General subdivision |
Design and construction |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Spanos, Costas J. |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Koha item type |
Book |
Source of classification or shelving scheme |
|