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Fundamentals of semiconductor manufacturing and process control / (Record no. 3544)

000 -LEADER
fixed length control field 00963nam a2200253 4500
001 - CONTROL NUMBER
control field 0000010152
003 - CONTROL NUMBER IDENTIFIER
control field 0
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20100203120122.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100521s2006####nyu###########001#0#eng##
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471784060
040 ## - CATALOGING SOURCE
Original cataloging agency PSP
Transcribing agency PSP
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) TK7871.85 M379 2006
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name May, Gary S.
245 10 - TITLE STATEMENT
Title Fundamentals of semiconductor manufacturing and process control /
Statement of responsibility, etc Gary S. May [and] Costas J. Spanos
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New Jersey :
Name of publisher, distributor, etc John Wiley & Sons,
Date of publication, distribution, etc 2006.
300 ## - PHYSICAL DESCRIPTION
Extent xix; 463p. :
Other physical details ill.;
Dimensions 24cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Design and construction
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Process control
General subdivision Statistical methods
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors
General subdivision Design and construction
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Spanos, Costas J.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Source of classification or shelving scheme
Holdings
Price effective from Permanent Location Date last seen Not for loan Date acquired Source of classification or shelving scheme Koha item type Barcode Damaged status Lost status Shelving location Withdrawn status Current Location Full call number
2010-06-15Perpustakaan Politeknik Seberang Perai2018-06-25 2010-06-15 Book0000041547  Open Shelf Perpustakaan Politeknik Seberang PeraiTK7871.85 M379 2006
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