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Fundamentals of semiconductor manufacturing and process control /

by May, Gary S; Spanos, Costas J.
Publisher: New Jersey : John Wiley & Sons, 2006Description: xix; 463p. : ill.; 24cm.ISBN: 0471784060 .Subject(s): Integrated circuits -- Design and construction | Process control -- Statistical methods | Semiconductors -- Design and construction
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Location Call number Status Date due
Open Shelf TK7871.85 M379 2006 (Browse shelf) Available

Includes bibliographical references and index

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